Author:
Miyao M.,Tamura M.,Tokuyama T.
Subject
Physics and Astronomy (miscellaneous)
Cited by
7 articles.
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1. Laser Processing of Semiconductors;Materials Processing: Theory and Practices;1983
2. Laser Processing of Semiconductors;Laser Processing and Analysis of Materials;1983
3. Ion Implantation Processes in Silicon;Impurity Doping Processes in Silicon;1981
4. Influence of spin density in implanted Si layers on pulsed‐laser annealing;Applied Physics Letters;1979-09
5. Laser assisted doping of Si with Ga or As;Zeitschrift für angewandte Mathematik und Physik ZAMP;1979-09