Composition of amorphous (Si,Ge):H films from nuclear elastic scattering of 12 MeV protons
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95535
Reference5 articles.
1. Amorphous Semiconductor Superlattices
2. New precision technique for measuring the concentration versus depth of hydrogen in solids
3. A Comparison of the Thermal Stabilities of Fluorinated and Hydrogenated Amorphous-Silicons
4. Nondestructive Analysis for Trace Amounts of Hydrogen
5. Elastic Scattering of Protons byFe56,Fe58, andNi58at 10.9 and 11.7 MeV
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1. Determination of the fluorine content ina‐Si:H:F by infrared spectroscopy, electron probe microanalysis, x‐ray photoelectron spectroscopy, and secondary ion mass spectrometry;Journal of Applied Physics;1989-06-15
2. Simultaneous depth profiling of constituents and impurities by elastic proton scattering in amorphous hydrogenated silicon films;Applied Physics Letters;1987-01-26
3. Properties of a‐Si,Ge:H,F alloys prepared by rf glow discharge in an ultrahigh vacuum reactor;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1986-11
4. ALLOYS OF AMORPHOUS HYDROGENATED SILICON;Amorphous Metals and Semiconductors;1986
5. Fluorine Incorporation and Annealing Properties of a-Si, Ge:H, F Alloys Studied by Elastic Proton Scattering and Ir Absorption;MRS Proceedings;1986
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