Photoluminescence and structural studies on extended defect evolution during high-temperature processing of ion-implanted epitaxial silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1357464
Reference41 articles.
1. Si (001) surface defects after extended high temperature annealing
2. Effects of H + , Ar + , and self-ion-irradiation on secondary defects in MeV P + -implanted Si( 100 )
3. A systematic analysis of defects in ion-implanted silicon
4. Depth distribution of secondary defects in 2‐MeV boron‐implanted silicon
5. Nucleation, growth and dissolution of extended defects in implanted Si: impact on dopant diffusion
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