Measurement of stress gradients generated by electromigration
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.89414
Reference11 articles.
1. Stress generation by electromigration
2. X‐Ray Extinction Contrast Topography of Silicon Strained by Thin Surface Films
3. X‐Ray Stress Topography of Thin Films on Germanium and Silicon
4. X‐ray diffraction topographs of silicon crystals with superposed oxide film. III. Intensity distribution
5. Lateral self-diffusion and electromigration in thin metal films
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