A low-temperature method for improving the performance of sputter-deposited ZnO thin-film transistors with supercritical fluid
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3124658
Reference16 articles.
1. High-performance flexible zinc tin oxide field-effect transistors
2. Zinc tin oxide transistors on flexible substrates
3. Transparent amorphous indium zinc oxide thin-film transistors fabricated at room temperature
4. Control of p- and n-type conductivity in sputter deposition of undoped ZnO
5. Characterization and optimization of zinc oxide films by r.f. magnetron sputtering
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