Application of SCF-LTDP technology for a-Si:H film defective passivation in X-ray PIN-based photosensor

Author:

Chen Jian-Jie,Chen Min-Chen,Chang Ting-Chang,Chen Hong-Chih,Zhou Kuan-Ju,Kuo Chuan-Wei,Yang Chih-Cheng,Wu Pei-Yu,Shih Chih-ChengORCID,Huang Jen-Wei

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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