Growth of highly tensile-strained Ge on relaxed InxGa1−xAs by metal-organic chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3005886
Reference48 articles.
1. A 90-nm Logic Technology Featuring Strained-Silicon
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3. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors
4. Hole mobility enhancements in strained Si/Si1−yGey p-type metal-oxide-semiconductor field-effect transistors grown on relaxed Si1−xGex (x
5. Ge n-MOSFETs on lightly doped substrates with high-/spl kappa/ dielectric and TaN gate
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