X‐ray photoelectron spectroscopic study of rapid thermal processing on SiO2/GaAs
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.101544
Reference11 articles.
1. XPS Study of Annealed SiO2 / GaAs Interfaces
2. Rapid isothermal processing
3. Study of electron traps inn‐GaAs resulting from infrared rapid thermal annealing
4. Production of the midgap electron trap (EL2) in molecular‐beam‐epitaxial GaAs by rapid thermal processing
5. Variations of electron traps in bulkn‐GaAs by rapid thermal processing
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