Second‐harmonic responses of modulated photoreflectance in semiconductors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.354338
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1. Ion implant monitoring with thermal wave technology
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5. Three‐dimensional theory to study photothermal phenomena of semiconductors. I. Modulated optical reflectance
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1. Carrier-density-wave transport property depth profilometry using spectroscopic photothermal radiometry of silicon wafers II: Experimental and computational aspects;Journal of Applied Physics;2003-05
2. A simplified surface photoreflectance measurement system;Measurement Science and Technology;2000-08-25
3. Reconstruction theory of thermal conductivity depth profiles by the modulated photoreflectance technique;Journal of Applied Physics;1998-07-15
4. Second harmonic modulated photo-reflectance imaging of integrated circuits;Le Journal de Physique IV;1994-07
5. A theoretical treatment for reconstruction of thermal conductivity depth profiles;Proceedings 2001 IEEE Hong Kong Electron Devices Meeting (Cat. No.01TH8553)
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