Piezoelectric acoustic wave characteristics of Pb(In0.5Nb0.5)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 single crystal substrate: A comparative study with and without SiO2 overlay-Reference-Cited by-同舟云学术

Piezoelectric acoustic wave characteristics of Pb(In_0.5Nb_0.5)O₃-Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ single crystal substrate: A comparative study with and without SiO₂ overlay

Published:2022-07-14 Issue:2 Volume:132 Page:024103
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zhang Qiaozhen¹^ORCID,Du Rufan¹,Li Baichuan¹,Liu Huiling²,Zhao Xiangyong²,Chen Ziyun³⁴^ORCID,Luo Haosu⁴^ORCID

Affiliation:

1. College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China

2. Key Laboratory of Optoelectronic Material and Device, Department of Physics, Shanghai Normal University, Shanghai 200234, China

3. Department of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

4. R&D Center of Synthetic Crystals, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China

Abstract

This paper investigates the excitation and propagation characteristics of a piezoelectric acoustic wave propagating in a rotated Y-cut X-propagating Pb(In0.5Nb0.5)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) relaxor-based ferroelectric single crystal substrate. Numerical simulations were performed to evaluate the acoustic wave properties by FEM software COMSOL. For comparison, two types of structures are taken into consideration: one is the traditional metal electrode/YX-PIN-PMN-PT and the other is silicon dioxide (SiO2) overlay/metal electrode/YX-PIN-PMN-PT substrate. It is shown that shear-horizontal (SH)-type piezoelectric boundary acoustic waves (PBAW) exist in the SiO2 overlay/metal electrode/YX-PIN-PMN-PT substrate and offer a fairly large electromechanical coupling factor K2 of 30%. Compared to a surface acoustic wave excited in the metal electrode/YX-PIN-PMN-PT substrate, enlarged phase velocity and significantly improved quality factor (∼3500) are simultaneously obtained for SH-type PBAW, which are promising for electromechanical transducer applications with high performance.

Funder

National Natural Science Youth Foundation of China

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0095058

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