Si-rich/SiO2 nanostructured multilayers by reactive magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1371794
Reference20 articles.
1. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
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4. Optical properties of Si clusters and Si nanocrystallites in high-temperature annealed SiOx films
5. The origin of photoluminescence from thin films of silicon‐rich silica
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