Wide-range measurements of plasma density using a hairpin resonance microwave probe
Author:
Affiliation:
1. Institute of Applied Physics, Russian Academy of Sciences, 46 Ulyanov Street, Nizhny Novgorod 603950, Russia
Funder
Russian Foundation for Basic Research
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5082169
Reference15 articles.
1. Microwave resonator probe for localized density measurements in weakly magnetized plasmas
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5. Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements
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