The nucleation and growth of silicon thin films on silicate glasses of variable composition using supersonic gas source molecular beam deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1728287
Reference30 articles.
1. Nucleation and Growth of Crystalline Silicon Films on Glass for Solar Cells
2. Growth of polycrystalline silicon films on glass by high-temperature chemical vapour deposition
3. Subsurface hydrogenated amorphous silicon to μc‐hydrogenated silicon transformation during magnetron sputter deposition determined by spectroscopic ellipsometry
4. Hydrogen‐surface reactions during the growth of hydrogenated amorphous silicon by reactive magnetron sputtering: A real time kinetic study byin situinfrared absorption
5. Influence of the substrate on the early stage of the growth of hydrogenated amorphous silicon evidenced by kinetic ellipsometry
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1. Initial nucleation stage in photo-CVD of GeH4 on SiO2 substrate monitored by real-time spectroscopic ellipsometry and photo reflectance: Accurate determination of incubation time;Journal of Vacuum Science & Technology A;2018-07
2. Formation and characterization of nanometer scale metal-oxide-semiconductor structures on GaAs using low-temperature atomic layer deposition;Applied Physics Letters;2005-07-04
3. Growth mode during initial stage of chemical vapor deposition;Applied Surface Science;2005-05
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