Parameter space region in the collisional magnetized electronegative plasma
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3310837
Reference21 articles.
1. Transient processes in an Ar+I2dc discharge
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3. Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers
4. Structure of presheath-sheath in magnetized electronegative plasma
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