1. Institute of Manufacturing Engineering, Department of
Mechanical Engineering, Tsinghua University, Beijing 100084,
People’s Republic of China
2. Beijing Key Lab of Precision/Ultra-precision Manufacturing
Equipments and Control, Tsinghua University, Beijing 100084,
People’s Republic of China
3. Institute of Instrument Science and Technology, Department of
Precision Instrument, Tsinghua University, Beijing 100084,
China