SiFx and SFx molecular ion implantations into GaAs
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98616
Reference1 articles.
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanism and Parameters Controlling the Decomposition Kinetics of Na2SiF6Powder to SiF4;International Journal of Chemical Kinetics;2016-04-28
2. Preparation of High-Purity Silicon Tetrafluoride by Thermal Dissociation of Na2SiF6;Russian Journal of Applied Chemistry;2003-09
3. Distribution Profiles of B Atoms in Diborane Implanted Silicon Prepared Using an Ion Implantor without Mass Filters;Japanese Journal of Applied Physics;1999-09-15
4. Adducts and dimers of SFn+ (n = 1–5) with benzene, acetonitrile, and pyridine. Gas-phase generation and ab initio structures and thermochemistry;International Journal of Mass Spectrometry;1999-03
5. Gas-Phase Chemistry of the Sulfur Hexafluoride Fragment Ions SFn+ (n = 0−5) and SFn2+ (n = 2, 4). Ab Initio Thermochemistry of Novel Reactions of S+• and SF+;The Journal of Physical Chemistry A;1998-06-17
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