Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1865319
Reference17 articles.
1. Determination of elastic modulus and thickness of surface layers by ultrasonic surface waves
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5. Application of narrow band laser ultrasonics to the nondestructive evaluation of thin bonding layers
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1. Dispersion of surface acoustic waves in thin films at extreme wavelength-to-thickness ratios;JASA Express Letters;2022-10
2. Development of a Broadband (100–240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films;Sensors;2022-10-01
3. Non-destructive characterization of surfaces and thin coatings using a large-bandwidth interdigital transducer;Review of Scientific Instruments;2018-12
4. Perspectives on oblique angle deposition of thin films: From fundamentals to devices;Progress in Materials Science;2016-03
5. Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range;AIP Advances;2014-12
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