Oxygen segregation in Czochralski silicon growth
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332115
Reference7 articles.
1. Properties of uniform oxygen Czochralski silicon crystals
2. Solid Solubilities of Impurity Elements in Germanium and Silicon*
3. Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon
4. Dynamic Oxygen Equilibrium in Silicon Melts during Crystal Growth by the Czochralski Technique
5. Effect of Microscopic Growth Rate on Oxygen Microsegregation and Swirl Defect Distribution in Czochralski‐Grown Silicon
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