High spatial frequency periodic structures formation on silicon using near UV femtosecond laser irradiation
Author:
Affiliation:
1. Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109, USA
2. Department of Atmospheric, Oceanic, and Space Sciences, University of Michigan, Ann Arbor, Michigan 48109, USA
Funder
DOD | USAF | AFMC | Air Force Office of Scientific Research
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5009776
Reference38 articles.
1. Femtosecond laser-induced periodic surface structures
2. Laser-Induced Periodic Surface Structures— A Scientific Evergreen
3. Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses
4. Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon
5. A femtosecond laser-induced periodical surface structure on crystalline silicon
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