Author:
Akai Daisuke,Katori Takeo,Takashima Daisuke,Ishida Makoto
Reference13 articles.
1. Integrated silicon-PVF2acoustic transducer arrays
2. Micromachined high frequency ferroelectric sonar transducers
3. Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms
4. Development of piezoelectric micromachined ultrasonic transducers
5. S. Machida1, T. Kobayashi, M. Degawa, T. Takezaki, H. Tanaka, S. Migitaka, K. Hashiba, H. Enomoto, T. Nagata, Y. Yoshimura, K. Asafusa, K. Ishida, S. Sano and M. Izumi: Transducers 2009 Tech. Dig. (2009) 2218.