AuO+and AuO+2gaseous ions formed during the sputter deposition of Au films in Ar‐O2discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338295
Reference13 articles.
1. Influence of Oxygen on the Adherence of Gold Films to Oxide Substrates
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4. Effect of oxygen on the bonding of gold to fused silica
5. Rare gas‐oxygen effects on the rf sputter deposition of platinum
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