Rare gas‐oxygen effects on the rf sputter deposition of platinum
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.331752
Reference7 articles.
1. Sputtering deposition, XPS and X-ray diffraction characterization of oxygen-platinum compounds
2. Oxygen induced preferred orientation of dc sputtered platinum
3. Formation of PtO films by reactive sputtering
4. Optical emission from neon/oxygen rf sputtering glow discharges
5. Argon‐oxygen interaction in rf sputtering glow discharges
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1. A Detailed Study of Electronic and Dynamic Properties of Noble Gas–Oxygen Molecule Adducts;Molecules;2022-11-01
2. Tailored Ceramic Film Growth at Low Temperature by Reactive Sputter Deposition;Critical Reviews in Solid State and Materials Sciences;1998-09
3. Oxygen Reduction Behavior of Thin‐Film Platinum and Platinum‐Rhodium Electrocatalysts in Sulfuric Acid;Journal of The Electrochemical Society;1995-04-01
4. Phase maps for sputter deposited refractory metal oxide ceramic coatings: review of niobium oxide, yttrium oxide, and zirconium oxide growth;Materials Science and Technology;1992-08
5. Fundamental Optical Absorption Edge of Sputter-Deposited Zirconia and Yttria;Journal of the American Ceramic Society;1990-11
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