Evolution of the microstructure in microcrystalline silicon prepared by very high frequency glow-discharge using hydrogen dilution
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.372311
Reference13 articles.
1. The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport
2. Complete microcrystallinep‐i‐nsolar cell—Crystalline or amorphous cell behavior?
3. Inverter made of complementary p and n channel transistors using a single directly deposited microcrystalline silicon film
4. Structure and growth of hydrogenated microcrystalline silicon: Investigation by transmission electron microscopy and Raman spectroscopy of films grown at different plasma excitation frequencies
5. Structure and growth of hydrogenated microcrystalline silicon: Investigation by transmission electron microscopy and Raman spectroscopy of films grown at different plasma excitation frequencies
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