Dynamics of the dissociative adsorption of disilane on Si(100): Energy scaling and the effect of corrugation
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.466228
Reference18 articles.
1. Silicon chemical vapor deposition one step at a time: fundamental studies of silicon hydride chemistry
2. Selective growth condition in disilane gas source silicon molecular beam epitaxy
3. The role of surface reactions in monosilane pyrolysis
4. Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface
5. Molecular beam studies of gas-surface collision dynamics
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