Diffusion and electrical activation of indium in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1572547
Reference19 articles.
1. Diffusion of indium in silicon inert and oxidizing ambients
2. Indium transient enhanced diffusion
3. Diffusion parameters of indium for silicon process modeling
4. Diffusion coefficient of indium in Si substrates and analytical redistribution profile model
5. A new acceptor level in indium‐doped silicon
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