1. Institute for Spectroscopy of the Russian Academy of Sciences, Fizicheskaya str. 5, Troitsk, Moscow 108840, Russia
2. EUV Labs, Sirenevy Bulevard str. 1, Troitsk, Moscow 108840, Russia
3. Prokhorov General Physics Institute of the Russian Academy of Sciences, Vavilov str. 38, Moscow 119991, Russia
4. Moscow Institute of Physics and Technology (State University), Institutskiy pereulok str. 9, Dolgoprudny, Moscow region 141701, Russia
5. ISTEQ B.V., High Tech Campus 9, 5656 AE Eindhoven, The Netherlands
6. ASML Netherlands B.V., De Run 6501, 5504DR Veldhoven, The Netherlands