A three-dimensional small angle measurement system based on autocollimation method

Author:

Ren Wenran1ORCID,Cui Jiwen1ORCID,Tan Jiubin1ORCID

Affiliation:

1. Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China

Abstract

A laser autocollimator based on transmission grating and combined reflector is proposed to simultaneously measure a three-dimensional angle. The optical configuration of the proposed autocollimator is designed, and a mathematical model for measuring a three-dimensional angle is established. The three-dimensional angle is obtained by detecting the change in the direction of the three measurement beams generated by grating diffraction and reflected by a combined reflector. The experimental setup based on the proposed autocollimator was constructed, and a series of experiments were performed to verify the feasibility of the proposed autocollimator for precision angle measurement. The experimental results showed that the measurement resolution of three-dimensional angles is better than 0.01", with measurement repeatability of yaw, pitch, and roll angles being 0.013", 0.012", and 0.009", respectively.

Funder

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

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