Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion‐beam assisted deposition
Author:
Affiliation:
1. Institute of Physics, University of São Paulo, C.P. 66318, 05389‐970 São Paulo‐SP, Brazil
2. Welding Research Institute, Osaka University, Ibaraki, Osaka 567, Japan
3. R & D Division, Nissin Electric Company, Ltd., Ukyo‐ku, Kyoto 615, Japan
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference17 articles.
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