Effect of Cl incorporation on the performance of amorphous silicon thin film transistors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366260
Reference9 articles.
1. Properties of hydrogenated amorphous silicon prepared by chemical vapor deposition
2. Voltage dependence of off current in a-Si:H TFT under backlight illumination
3. The study of transport and related properties of amorphous silicon by transient experiments
4. Amorphous Silicon Films from Dichlorosilane and Hydrogen
5. Improvement of film Quality of A-Si:H Deposited by Photo-CVD using SiH2Cl2
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3. UV Illumination Technique for Leakage Current Reduction in a-Si:H Thin-Film Transistors;IEEE Transactions on Electron Devices;2008-11
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