Growth kinetics of platinum silicide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332782
Reference17 articles.
1. Refractory silicides for integrated circuits
2. Selective growth of metal‐rich silicide of near‐noble metals
3. Growth kinetics of Pd2Si from evaporated and sputter-deposited films
4. Growth rates for Pt2Si and PtSi formation under UHV and controlled impurity atmospheres
5. The oxygen effect in the growth kinetics of platinum silicides
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