Author:
Chen Jiahe,Yang Deren,Ma Xiangyang,Li Hong,Que Duanlin
Subject
General Physics and Astronomy
Reference20 articles.
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3. The Engineering of Silicon Wafer Material Properties Through Vacancy Concentration Profile Control and the Achievement of Ideal Oxygen Precipitation Behavior
4. Gettering mechanisms in silicon
5. The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process
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