1. Łukasiewicz Research Network—PORT Polish Center for Technology Development, Stabłowicka 147, 54-066 Wrocław, Poland
2. Faculty of Microsystem Electronics and Photonics, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
3. Faculty of Physics, University of Wrocław, Plac Maxa Borna 9, 50-204 Wrocław, Poland
4. Łukasiewicz Research Network—Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland
5. Faculty of Fundamental Problems of Technology, Wrocław University of Science and Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland