Verification of threading dislocations density estimation methods suitable for efficient structural characterization of AlxGa1−xN/GaN heterostructures grown by MOVPE

Author:

Moszak K.1ORCID,Olszewski W.1ORCID,Pucicki D.12ORCID,Serafińczuk J.12ORCID,Opołczyńska K.13ORCID,Rudziński M.4,Kudrawiec R.15ORCID,Hommel D.13ORCID

Affiliation:

1. Łukasiewicz Research Network—PORT Polish Center for Technology Development, Stabłowicka 147, 54-066 Wrocław, Poland

2. Faculty of Microsystem Electronics and Photonics, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

3. Faculty of Physics, University of Wrocław, Plac Maxa Borna 9, 50-204 Wrocław, Poland

4. Łukasiewicz Research Network—Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland

5. Faculty of Fundamental Problems of Technology, Wrocław University of Science and Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

Funder

Fundacja na rzecz Nauki Polskiej

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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