The influence of oxygen on SiO2sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346431
Reference16 articles.
1. Mechanisms and theory of physical sputtering by particle impact
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4. Ion bombardment induced changes in silicon dioxide surface composition studied by x‐ray photoelectron spectroscopy
5. Build-up and annealing of damage induced by ion and electron beams at SiO2 surfaces: An AES study
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3. Ion-induced electron emission as a means of studying energy- and angle-dependent compositional changes of solids bombarded with reactive ions;Surface Science;1999-01
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