Mechanisms and theory of physical sputtering by particle impact-Reference-Cited by-同舟云学术

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Mechanisms and theory of physical sputtering by particle impact

Published:1987-06 Issue:1 Volume:27 Page:1-20
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Sigmund Peter

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference358 articles.

1. Inelastic Ion-Surface Collisions;Sigmund,1977

2. Sputtering by Particle Bombardment I,1981

3. Sputtering by Particle Bombardment II,1983

4. R. Behrisch and K. Wittmaack, eds., Sputtering by Particle Bombardment III, in preparation.

5. P. Sigmund, in ref. [2], p. 9

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