Recrystallization of carbon–aluminum ion coimplanted epitaxial silicon carbide—evidenced by room temperature optical measurements
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124412
Reference25 articles.
1. Thin film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon carbide
2. Al and B ion‐implantations in 6H‐ and 3C‐SiC
3. Nitrogen implantation in (100)‐β‐SiC layers grown on Si substrate
4. Defect annealing in ion implanted silicon carbide
5. Phosphorus‐related donors in 6H‐SiC generated by ion implantation
Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microstructure Investigation of He+- Implanted and Post-Implantation-Annealed 4H-SiC;Key Engineering Materials;2019-07
2. Surface damage on 6H–SiC by highly-charged Xe q+ ions irradiation;Journal of Nuclear Materials;2014-12
3. Effect of metal diffusion into polycrystalline 6H–SiC prior to its anodization on luminescence response;Superlattices and Microstructures;2012-05
4. Nitrogen-promoted formation of graphite-like aggregations in SiC during neutron irradiation;Journal of Applied Physics;2012-03-15
5. Annealing of silver implanted 6H–SiC and the diffusion of the silver;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3