Gas source silicon molecular beam epitaxy using silane
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99009
Reference7 articles.
1. Silicon molecular beam epitaxy: 1984–1986
2. Boron heavy doping for Si molecular beam epitaxy using a HBO2source
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4. Silicon/insulator heteroepitaxial structures formed by vacuum deposition of CaF2 and Si
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