Resistless patterning for selective growth

Author:

Shiralagi Kumar,Tsui Raymond,Goronkin Herbert

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Resistless patterning of a chlorine monolayer on a Si(001) surface with an electron beam;Applied Surface Science;2011-08

2. Postfabrication fine-tuning of photonic crystal microcavities in InAs∕InP quantum dot membranes;Applied Physics Letters;2005-10-10

3. Selective plasma nitridation and contrast reversed etching of silicon;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001

4. Selective growth on facets and in situ mask removal for regrowth;Journal of Crystal Growth;1999-05

5. Resistless patterning of Si for processing;Applied Physics Letters;1999-02-08

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