Subject
General Physics and Astronomy
Reference24 articles.
1. Micro Electro Mechanical Systems (MEMS) Micro-Switches for Use in DC, RF, and Optical Applications
2. Touch mode capacitive pressure sensors
3. Surface engineering and microtribology for microelectromechanical systems
4. Effects of electrical and thermal phenomena on the evolution of adhesion at contact interfaces of electrostatically activated surface microstructures
5. G. T. Mulhern, D. S. Soane, and R. T. Howe, in Proceedings of the Seventh International Conference on Solid-State Sensors and Actuators, Transducers '93, Yokohama, Japan, 7–10 June 1993 (IEEE, Piscataway, NJ, 1993), p. 296.
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