Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics
Reference66 articles.
1. Integrated movable micromechanical structures for sensors and actuators;Fan;IEEE Trans. Electron Devices,1988
2. Integrated fabrication of polysilicon mechanisms;Mehregany;IEEE Trans. Electron Devices,1988
3. Laterally driven polysilicon resonant microstructures;Tang;Sensors and Actuators,1989
4. Polysilicon micro vibromotors;Lee,1992
5. The digital micromirror device and its application to projection displays;Sampsell,1993
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