Perturbation theory for surface-profile imaging with a capacitive probe
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1312852
Reference8 articles.
1. An investigation into the applicability of perturbation techniques to solve the boundary integral equations for a parallel-plate capacitor with a rough electrode
2. Rough-surface capacitor: approximations of the capacitance with elementary functions
3. Surface-roughness effect on capacitance and leakage current of an insulating film
4. Theory of scanning capacitance microscopy
5. Scanning capacitance microscopy on a 25 nm scale
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1. INTEGRAL METHOD FOR A CAPACITANCE MICROSCOPE THAT IS BASED ON CYLINDRIC METALLIC SURFACES;Progress In Electromagnetics Research B;2010
2. Analytic perturbation solution to the capacitance system of a hyberboloidal tip and a rough surface;Applied Physics Letters;2008-03-31
3. Capacitance measurement of Gaussian random rough surfaces with planar and corrugated electrodes;Measurement Science and Technology;2005-02-01
4. Atomic force microscopy modified for studying electric properties of thin films and crystals. Review;Crystallography Reports;2004-05
5. The lateral resolution limit for imaging periodic conducting surfaces in capacitive microscopy;Journal of Physics D: Applied Physics;2000-10-31
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