Highly conformal magnesium oxide thin films by low-temperature chemical vapor deposition from Mg(H3BNMe2BH3)2 and water-Reference-Cited by-同舟云学术

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Highly conformal magnesium oxide thin films by low-temperature chemical vapor deposition from Mg(H3BNMe2BH3)2 and water

Published:2013-03-11 Issue:10 Volume:102 Page:101605
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Wang Wenjiao B.,Yang Yu,Yanguas-Gil Angel,Chang Noel N.,Girolami Gregory S.,Abelson John R.

Funder

U.S. Department of Energy

National Science Foundation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4795860

Reference40 articles.

1. Electrical Characterization of GaN Metal Oxide Semiconductor Diodes Using MgO as the Gate Oxide

2. Magnesium oxide as a candidate high-κ gate dielectric

3. Development of epitaxial NbN/MgO/NbN–superconductor-insulator-superconductor mixers for operations over the Nb gap frequency

4. Biaxially Textured IBAD-MgO Templates for YBCO-Coated Conductors

5. Discharge-time lag in a plasma display—Selection of protection layer (γ surface)

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