High yield uniformity in pseudo-vertical diamond Schottky barrier diodes fabricated on half-inch single-crystal wafers-Reference-Cited by-同舟云学术

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High yield uniformity in pseudo-vertical diamond Schottky barrier diodes fabricated on half-inch single-crystal wafers

Published:2020-12-28 Issue:26 Volume:117 Page:262107
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Hanada Takanori¹^ORCID,Ohmagari Shinya²³^ORCID,Kaneko Junichi H.¹,Umezawa Hitoshi²^ORCID

Affiliation:

1. Faculty of Engineering, Hokkaido University, Kita 13, Nishi 8, Kita-ku, Sapporo 060-8628, Japan

2. Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan

3. Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 807-1 Shuku-machi, Tosu, Saga 841-0052, Japan

Funder

Japan Atomic Energy Agency

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0027729

Reference35 articles.

1. Diamond power devices: state of the art, modelling, figures of merit and future perspective

2. Doping and interface of homoepitaxial diamond for electronic applications

3. Large-area high-quality single crystal diamond

4. High-temperature characteristics and stability of Cu/diamond Schottky diodes

5. Power diamond vertical Schottky barrier diode with 10 A forward current

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1. Diamond/SnO₂ Heterojunction p-n Diodes With Ion/off of 10⁸ and Breakdown Voltage Over 400 V;IEEE Electron Device Letters;2024-08

2. Enlargement of effective area in Schottky barrier diodes on heteroepitaxial (001) diamond substrates by defect reduction and their radiation tolerance;Diamond and Related Materials;2024-08

3. A Review of Diamond Materials and Applications in Power Semiconductor Devices;Materials;2024-07-11

4. Multi-microscopy characterization of threading dislocations in CVD-grown diamond films;Applied Physics Letters;2024-03-04

5. Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls;Functional Diamond;2023-09-29

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