Author:
Tsaur B. Y.,Lau S. S.,Mayer J. W.
Subject
Physics and Astronomy (miscellaneous)
Cited by
58 articles.
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1. Ion beam induced surface and interface engineering;Surface Science Reports;2011-03
2. An overview of the ion beam mixing rates in Pd/Si bilayers versus the temperature and deposited energy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-11
3. The effect of Ar+ irradiation on grain growth and reducing reaction temperature in Pd-silicide formation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-07
4. Fine pattern definition with atomic intermixing induced by focused ion beam and its application to x-ray mask fabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-03
5. Kinetics of ion-beam mixing at Ti-Si interfaces;Journal of Materials Science: Materials in Electronics;1990-08