Dependence of growth and nanomechanical properties of ultrathin amorphous carbon films on radio frequency sputtering conditions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371041
Reference24 articles.
1. Characterization of diamondlike carbon films and their application as overcoats on thin‐film media for magnetic recording
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3. Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating
4. Vapor deposition processes for amorphous carbon films withsp3fractions approaching diamond
5. Pulsed laser deposition of diamond‐like carbon films
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1. A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique;Journal of Materials Research;2023-01-05
2. Thermal stability and diffusion characteristics of ultrathin amorphous carbon films grown on crystalline and nitrogenated silicon substrates by filtered cathodic vacuum arc deposition;Scientific Reports;2021-06-23
3. Friction, nanostructure, and residual stress of single-layer and multi-layer amorphous carbon films deposited by radio-frequency sputtering;Journal of Materials Research;2016-01-28
4. Hybridization and tribomechanical properties of ultrathin amorphous carbon films synthesized by radio-frequency low-pressure plasma discharges;Surface and Coatings Technology;2015-01
5. Tetrahedral and Trigonal Carbon Atom Hybridization in Thin Amorphous Carbon Films Synthesized by Radio-Frequency Sputtering;The Journal of Physical Chemistry C;2007-06-19
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