Properties of silicon dioxide films prepared by pulsed‐laser ablation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350411
Reference30 articles.
1. Low-energy ion beam oxidation of silicon
2. Characterization of Plasma‐Deposited Silicon Dioxide
3. Local bonding environments of Si–OH groups in SiO2 deposited by remote plasma‐enhanced chemical vapor deposition and incorporated by postdeposition exposure to water vapor
4. Contamination in Films Sputtered From Hot-Pressed Targets
5. Comparison of properties of dielectric films deposited by various methods
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