Evidence for oxygen bubbles in subsurface Al2O3layers formed in aluminum by oxygen implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.97593
Reference13 articles.
1. Formation of subsurface Al 2O 3 layers in aluminum by oxygen ion implantation
2. Conduction in metal oxide thin films formed by oxygen ion implantation
3. Some preliminary studies of the structure of ion bombarded thin films
4. Synthesis of Al2O3 by ion implantation of oxygen into aluminium
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