Phonon-mediated characterization of microelectromechanical resonators
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2335781
Reference13 articles.
1. Laterally Driven Polysilicon Resonant Microstructures
2. Techniques to study the reliability of metal RF MEMS capacitive switches
3. Reliability of MEMS - a methodical approach
4. Fabrication and characterization of polycrystalline SiC resonators
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1. Two-Port Electromechanical Model for Bulk-Piezoelectric Excitation of Surface Micromachined Beam Resonators;Journal of Microelectromechanical Systems;2009-06
2. Phonon detection technique for the study of the temperature coefficient of resonance frequency in clamped–clamped beam resonators;Journal of Micromechanics and Microengineering;2009-05-22
3. An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators;SPIE Proceedings;2009-02-12
4. Acoustic phonon characterisation of fixed-fixed beam MEMS switch;Electronics Letters;2009
5. Study of the nonlinearities in micromechanical clamped–clamped beam resonators using stroboscopic SEM;Journal of Micromechanics and Microengineering;2008-07-24
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