Characterization of silicon micro-oscillators by scanning laser vibrometry
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1502014
Reference12 articles.
1. A nanometre-scale mechanical electrometer
2. Ferromagnetic resonance force microscopy on microscopic cobalt single layer films
3. High-Q oscillator torque magnetometer
4. Single‐crystal silicon high‐Q torsional oscillators
5. Elastic Properties of Thin Films
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