1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. Key Laboratory of Terahertz Solid-State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
4. School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China
5. Kagami Memorial Research Institute for Materials Science and Technology, Waseda University, Shinjuku, Tokyo 169-0051, Japan
6. Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg 41296, Sweden
7. Science and Technology on Power Sources Laboratory, Tianjin Institute of Power Sources, Tianjin 300384, China