Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368599
Reference40 articles.
1. Carbon deposition using an expanding cascaded arc d.c. plasma
2. Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma
3. Deposition of diamondlike films by electron cyclotron resonance microwave plasmas
4. Structural models of a-C and a-C:H
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